Izinzwa Zobubanzi Bentambo ye-CCD Zinika Amandla Ukuthuthukiswa Kwezinqubo Ze-Semiconductor Wafer

Njengoba ukukhiqizwa kwe-semiconductor kungena enkathini ye-nanometer, ama-wafer, njengabathwali abayinhloko bama-chips, anquma ngqo isivuno kanye nezindleko ngokunemba kwawo kwendawo kanye nokuvumelana kwe-angular ngesikhathi sokucubungula nokuthuthwa.

 

Kuyo yonke inqubo yokusika, ukuhlikihla, ukumboza, ukusika, ukulungiswa kwangaphambi kokupakisha kanye nezinye izinqubo, ama-wafer athambekele ekushintsheni okuncane, ukuthambekela kwe-angular kanye nokuphambuka kwe-trajectory ngenxa yokudlidliza komshini, amaphutha okudlulisa kanye nokuphambuka kwamathuluzi. Ngisho nokuphambuka kwezinga le-micron kungaholela ezinkingeni zobukhulu njengokusika ama-chipping, ukuphambuka kwe-overlay kanye nokwehluleka kokubopha, kunciphise kakhulu amandla okukhiqiza kanye nokuthuthukiswa kwesivuno. Izindlela zokubeka imishini zendabuko kanye nokulungiswa ngesandla zibonisa ukunemba okuphansi kanye nokusabela okuhamba kancane, ukwehluleka ukuzivumelanisa nokukhiqizwa kwesisindo okusheshayo futhi kuhlangabezane nezidingo zezinqubo ezithuthukisiwe.

 

Ngenxa yalesi simo, inzwa yokulungisa ububanzi bentambo ye-Lanbao CCD isibe yidivayisi esekelayo yokulungisa ukulingana okunembile kanye nokuphambuka ezinqubweni zokukhiqiza i-wafer ye-semiconductor, ngamakhono ayo ayinhloko okungathintani, ukunemba okuphezulu kanye nokulungiswa kwesikhathi sangempela okuguquguqukayo. Inikeza iziqinisekiso ezithembekile zokukhiqiza ukunemba okuzenzakalelayo.

 

Ngesikhathi sokusebenza, i-transmitter ikhiqiza ikhethini lokukhanya elifanayo elihambisanayo elimboza umphetho we-wafer. I-matrix ye-CCD yokwamukela ibamba umngcele ovinjiwe wokukhanya nomnyama, ikhiphe amanani e-wafer offset ngesikhathi sangempela, iwaphakele ohlelweni lokulawula umugqa wokukhiqiza, futhi iqhube ipulatifomu ye-UVW ukuze iqedele ukulungiswa okunamandla kwezinga le-millisecond, yakha ukulawula okuvaliwe kokulinganisa - ukubala - ukulungiswa. Yonke inqubo yenza kuphela ukuzwa isikhundla okusekelwe kudatha, ngaphandle kwezithombe, izithombe noma ukutholwa kwamaphutha. Inikeza impendulo esheshayo, ukuzinza okuqinile kanye nezindleko eziphansi, ifanelana kahle nezimo zokukhiqiza ngobuningi be-semiconductor.

 

Inzwa yokulungisa ububanzi bentambo ye-Lanbao CCD ibhekane nokwenza ngcono okuqondiwe, ifinyelela ukunemba okuphezulu kakhulu kokuqoqwa okungu-±1 μm, okungabamba ngokunembile ukufuduka okuncane kanye nokuphambuka kwe-angular kwemiphetho ye-wafer engu-8/12-intshi. Ifakwe i-algorithm yesinxephezelo sokukhukhuleka kokushisa okuguquguqukayo, ine-coefficient yokushisa ephansi njengo-±8 μm/℃, imelana ngempumelelo nokuguquguquka kokushisa kwe-workshop, ukudlidliza okuncane kanye nokuphazamiseka kothuli. Igcina idatha ezinzile ngaphandle kwamaphutha okukhukhuleka noma okulinganisa ngesikhathi sokusebenza okuqhubekayo isikhathi eside. Isekela ukulungiswa okuguquguqukayo kwesivinini esiphezulu okungaphazanyiswa amahora angama-24/7, iqinisekisa ukunemba kokuqondanisa kwezinga le-nanometer ngenkathi ithuthukisa kakhulu ukusebenza kahle kokugeleza komugqa wokukhiqiza, ukulinganisa ukunemba kanye nokusebenza kahle.

 

Njengoba ineminyaka eminingi yobuchwepheshe bokuzwa kwezimboni obuqongelelwe, inzwa yokulungisa ububanzi bentambo ye-Lanbao CCD inikeza izinzuzo ezintathu eziyinhloko ekulungiseni i-wafer, ihlangabezana kahle nezidingo eziqinile zokukhiqizwa kwesisindo se-semiconductor:

• Ukulungiswa okunamandla okunembe kakhulu:Iqoqa ububanzi bentambo yomphetho kanye nedatha yesikhundla ngesikhathi sangempela, ngempendulo yezinga le-millisecond ukuze kulungiswe ukuphambuka. Iqeda ukubambezeleka kokulungiswa okungaguquki futhi ivumelane nemigqa yokukhiqiza ezenzakalelayo esheshayo.

• Ukuzinza okuphezulu kanye nokusebenza kokulwa nokuphazamiseka:Ifakwe imodyuli yesihlungi esilwa nokukhanya, isebenza ngokuqina ngaphansi kokukhanya okungu-3000 lux, ivumelana nokuhlanzeka okuphezulu kanye nezimo zokusebenza eziphazamisa kakhulu ama-workshop e-semiconductor.

• Ukuzivumelanisa nezimo okungenakho ukuthintana nokulimala:Yamukela isilinganiso sokungathintani kwesihenqo sokukhanya esibonakalayo, igwema ukuthintana nobuso kanye nomphetho we-wafer. Ivimbela ngokuphelele imihuzuko kanye nomonakalo wokukhipha ama-wafer amancane kakhulu (≤200 μm), iqinisekisa ubuqotho be-wafer.

 

Njengamanje, inzwa yokulungisa ububanzi bentambo ye-Lanbao CCD isetshenziswa kabanzi ezinqubweni ezibalulekile ezifana nokulungiswa kwangaphambili kwe-wafer, ukulungiswa kokudluliselwa komugqa womhlangano, ukulungiswa kokulungiswa kwangaphambili kanye nokubekwa kwangaphambi kokupakisha. Ingenza ukuqapha ukuphambuka kwesikhundla ngesikhathi sangempela, impendulo yedatha kanye nokulungiswa okuguquguqukayo ukulawula i-closed loop, ukuqinisekisa ukuthi ama-wafer agcina izikhundla zokucubungula ezijwayelekile kanye nezindlela zokudlulisa kuyo yonke inqubo. Ixazulula ngokuyisisekelo izinkinga zokukhiqiza ngobuningi njengemikhiqizo enephutha, ukulahlekelwa kwezinto ezibonakalayo kanye nokulungiswa kabusha kwenqubo okubangelwa ukususwa kokulungiswa. Idatha elinganisiwe ikhombisa ukuthi ngesisombululo sokulungiswa kwe-Lanbao CCD, izindleko zokulinganisa ngesandla zincishiswa ngo-80%, futhi isikhathi sokungasebenzi kwemishini sincishiswa kakhulu, okusiza amabhizinisi ukufeza imigomo emibili yokunciphisa izindleko, ukuthuthukisa ukusebenza kahle kanye nokuthuthukisa ikhwalithi.

 

 

 

Njengebhizinisi lobuchwepheshe obuphezulu eligxile kakhulu ekuqondeni kwezimboni, i-Lanbao Sensing igxile ekubhekaneni nezindawo ezibuhlungu ekukhiqizeni okuhlakaniphile kwe-semiconductor kanye nokuthuthukisa amadivayisi okulungisa nokuhlukanisa aklanyelwe ukukhiqizwa okuphezulu. Inzwa yayo yokulungisa ububanzi be-wafer ye-CCD yenzelwe ngokukhethekile izimo zokucubungula ngokunemba kwe-wafer, ihlangabezana ngqo nezindinganiso zokukhiqizwa ngobuningi ezinembile, ezizinzile kakhulu kanye nokuthembeka okuphezulu embonini ye-semiconductor. Isekela ibhasi lezimboni le-EtherCAT, ingaxhuma kalula emigqeni ehlukahlukene yokukhiqiza i-wafer ezenzakalelayo. Esikhathini esizayo, i-Lanbao Sensing izoqhubeka nokujulisa ukuba khona kwayo emkhakheni we-semiconductor, ithuthukise ubuchwepheshe bokulungisa ukuzwela kanye nokusebenza komkhiqizo, futhi inike amandla ukuthuthukiswa okukhulu, okunembile futhi okusebenzayo kwemboni ye-semiconductor yaseShayina ngamakhono okuqonda ezimboni aqinile.