Sensor ya Lanbao PDE Laser Displacement Sensor: Kuthandizira Kupanga kwa Precision Semiconductor

Kupanga ma semiconductor ndi imodzi mwamagawo ofunikira kwambiri komanso ovuta kwambiri pamakampani amakono apamwamba. Pamene njira za chip zikupita ku 3nm ngakhalenso ma node ang'onoang'ono, kulondola kwa miyeso ya makulidwe a wafer, kusalala kwa pamwamba, ndi kukula kwa microstructure kumatsimikizira mwachindunji kukolola kwa chip ndi magwiridwe antchito. Munkhaniyi, masensa a laser displacement, ndi ntchito yawo yosalumikizana, kulondola kwambiri, nthawi yoyankha mwachangu, komanso kukhazikika kokhazikika, zakhala "maso oyezera" ofunikira panthawi yonse yopanga semiconductor.

4

Monga gawo laling'ono lopangira zida za semiconductor, zopyapyala zimafunikira kulondola kwambiri komanso kudalirika panthawi yopanga. Pakati pa magawo ambiri ofunikira popanga mawafa, kuyeza kolondola kwa kusamuka ndikofunikira kwambiri - kumakhudza kwambiri magwiridwe antchito ndi zokolola za chip chomaliza. Monga mtsogoleri wotsogola mu gawo lazowonera mafakitale ku China, ma sensor a Lansensor's PDE laser displacement sensors, okhala ndi ma micron-level resolution, algorithms anzeru, komanso kudalirika kwamafakitale, atuluka ngati njira yabwino yopangira njira zopangira zophika.

Zovuta Zolondola Pakupanga Wafer ndi Ubwino wa Zomverera za Laser Displacement

Kupanga ma wafer kumaphatikizapo njira zingapo zovuta monga fotolithography, etching, kuyika filimu yopyapyala, ndi kulumikizana - chilichonse chimafuna kulondola kwambiri pamlingo wa micrometer kapena nanometer. Mwachitsanzo:

  • Mu photolithography, kuyanjanitsa bwino pakati pa photomask ndi wafer ndikofunikira kuti zitsimikizo zolondola zapatani zisunthidwe pamtunda.

  • Pakuyika filimu yopyapyala, kuwongolera ndendende makulidwe a filimu ndikofunikira kuti zitsimikizire magwiridwe antchito amagetsi pazida.
    Ngakhale kupatuka pang'ono kumatha kubweretsa kuwonongeka kwazinthu kapenanso kupangitsa kuti mtanda wonse ukhale wosagwiritsidwa ntchito.

Njira zoyezera zamakina zamakina nthawi zambiri zimalephera kukwaniritsa zofunikira zolondola kwambiri. Kuphatikiza apo, amakhala pachiwopsezo chowononga kapena kuwononga malo osalimba, pomwe kuthamanga kwawo pang'onopang'ono kumawapangitsa kukhala osakwanira kukwaniritsa zofunikira za metrology.

LabaosensaPDE Series Laser Displacement Sensor: Njira Yoyenera Yogwiritsira Ntchito Wafer

2

Kuyeza kwa Laser kosalumikizana
Imagwiritsa ntchito mawonedwe a mtengo wa laser pamalo omwe chandamale, kusanthula zidziwitso zowonekera / zobalalika kuti apeze zomwe akusamuka - kuchotsa kukhudzana ndi zowonda kuti apewe kuwonongeka kwamakina ndi kuipitsidwa.

Micron-level Precision
Ukadaulo wapamwamba kwambiri wa laser ndi ma aligorivimu opangira ma siginecha amapereka kulondola kwa milingo ya micrometer komanso kusamvana, kukwaniritsa zofunika kwambiri pakupangira njira zopangira mkate.

Kuyankha mwachangu kwambiri (<10ms)
Zimathandizira kuyang'anira nthawi yeniyeni ya kusinthika kosinthika, zomwe zimalola kuti zizindikiridwe zopotoka nthawi yomweyo ndikuwongolera kuti zithandizire kupanga bwino.

Kugwirizana Kwapadera Kwazinthu
Kutha kuyeza zida zosiyanasiyana ndi mitundu yapamtunda yokhala ndi kusinthika kwamphamvu kwachilengedwe, koyenera magawo angapo a semiconductor process.

Compact Industrial Design
The compact form factor imathandizira kuphatikizana kosasunthika mu zida zamagetsi ndi machitidwe owongolera, zomwe zimathandizira kuwunikira njira zanzeru komanso kusintha kotseka.

Zochitika Zantchito zaPDE Series Laser Displacement Sensormu Wafer Processing

3

Sensor ya LabaoPDE Series Laser Displacement Sensor: Zofunikira Zofunikira mu Wafer Manufacturing

Ndi magwiridwe antchito apadera, masensa a Lansensor PDE laser displacement amatenga gawo lofunikira pamachitidwe angapo opangira mawafa:

Wafer Alignment & Positioning
Pazithunzi ndi njira zomangira zomwe zimafuna kulondola kwa mulingo wa micron, masensa athu amayezera ndendende malo opindika ndi ma angles opendekeka kuti zitsimikizire kulondola kwa chigoba-ku-wafer ndikuyika mkono womangirira - kupititsa patsogolo kusamutsa kwapatani.

Wafer Thickness Metrology
Kuthandizira kuyeza makulidwe osalumikizana ndi kuwunika nthawi yeniyeni panthawi yoyika, kuwonetsetsa kuwongolera koyenera kwa filimu yopyapyala.

Kuyendera kwa Wafer Flatness
Kuzindikira tsamba lawafer ndi kupindika kwapamtunda ndi sub-micron resolution kuti mupewe zowotcha zopindika kuti zisapitirire kutsika.

Kuwunika Makulidwe a Filimu Yoonda
Kupereka kutsata makulidwe a nthawi yeniyeni munthawi ya CVD/PVD kuti mukhalebe ndi mawonekedwe okhwima amagetsi.

Kuzindikira Kuwonongeka kwa Pamwamba
Kuzindikiritsa zovuta zapang'ono zazing'ono (zokanda, tinthu tating'onoting'ono) kudzera pamapu osunthika osunthika kwambiri, kuwongolera kwambiri kuchuluka kwa ziwopsezo.

Equipment Condition Monitoring
Kutsata kusuntha kwazinthu zofunikira (mikono ya roboti, mayendedwe a siteji) ndi kugwedezeka kwa makina kuti akonze zolosera komanso kukhathamiritsa kukhazikika. 

5

Mndandanda wa PDE wa Lanbao sensor sikuti umangowonjezera mipata yaukadaulo pamsika waku China wama sensor apamwamba kwambiri koma imakhazikitsa ma benchmarks atsopano apadziko lonse lapansi ndi magwiridwe ake apadera. Kaya kukulitsa zokolola, kuchepetsa mtengo wopanga, kapena kupititsa patsogolo chitukuko cham'badwo wotsatira, mndandanda wa PDE umakhala ngati chida chanu chogonjetsera zovuta zopanga semiconductor!


Nthawi yotumiza: May-08-2025