Babban Na'urar Firikwensin Daidaito Yana Taimakawa Samar da Daidaiton Semiconductor
Babban Bayani
Na'urar firikwensin laser mai inganci da firikwensin motsi ta Lanbao, firikwensin confocal na spectral da firikwensin laser na 3D na iya samar da ayyuka na musamman da kuma hanyoyin auna daidaito daban-daban ga masana'antar semiconductor.
Bayanin Aikace-aikace
Na'urar hangen nesa ta Lanbao, na'urar firikwensin ƙarfi, na'urar firikwensin hoto, na'urar firikwensin kusanci, na'urar firikwensin gujewa cikas, na'urar firikwensin labulen haske na yanki da sauransu na iya samar da bayanai masu mahimmanci ga robots na hannu da robots na masana'antu don yin ayyukan da suka dace daidai, kamar bin diddigi, sanya wuri, guje wa cikas, da kuma daidaita ayyukan.
Ƙananan rukunoni
Abubuwan da ke cikin takardar neman izinin
Mai hana ɗaukar hoto
Firikwensin motsi na laser mai inganci yana gano tsayin murfin photoresist don kiyaye daidaiton murfin da ya dace.
Injin Dicing
Kauri na yankan ruwan wukake yana da dubun microns kawai, kuma daidaiton gano na'urar firikwensin matsar da laser mai inganci zai iya kaiwa 5um, don haka ana iya auna kauri na ruwan wukake ta hanyar shigar da na'urori masu auna firikwensin guda biyu fuska da fuska, wanda zai iya rage lokacin gyara sosai.
Binciken Wafer
Ana buƙatar kayan aikin duba yanayin wafer don duba inganci yayin samar da wafer batch. Wannan kayan aikin ya dogara ne akan duba gani na na'urar firikwensin canjin laser mai inganci don cimma daidaiton mayar da hankali.