Kugadzira maSemiconductors kuri pakati peminda inonyanya kuda kunyatsorongeka uye yakaoma tekinoroji muindasitiri yemazuva ano yetekinoroji yepamusoro. Sezvo mashandiro echip achifambira mberi kusvika ku3nm uye kunyange madiki madiki, kururama kwekuyera ukobvu hwewafer, kutsetseka kwepamusoro, uye saizi ye microstructure kunosarudza zvakananga goho uye mashandiro echip. Mumamiriro ezvinhu aya, ma laser displacement sensors, nekushanda kwavo kusingabatanidzi, kunyatsojeka kwepamusoro, nguva yekupindura nekukurumidza, uye kugadzikana kwakawedzerwa, ave "maziso ekuyera" akakosha mukati memaitiro ese ekugadzira semiconductor.
Sechinhu chikuru chekugadzirwa kwemidziyo ye semiconductor, ma wafer anoda kunyatsojeka uye kuvimbika panguva yekugadzira. Pakati pezvikamu zvakawanda zvakakosha zvekugadzira ma wafer, kuyera kwakarurama kwekufambiswa kwezvinhu ndiko kunonyanya kukosha—kunokanganisa zvakananga mashandiro echip yekupedzisira uye goho rayo. Semutungamiri wekuvandudza zvinhu muChina muindasitiri yekuona maindasitiri, ma Lansensor's PDE series laser displacement sensors, ane micron-level resolution, intelligent algorithms, uye industrial-grade reliability, akabuda semhinduro inosarudzwa yemaitiro ekugadzira ma wafer.
Matambudziko Ekugadzirisa Zvakakwana Mukugadzira Wafer uye Mabhenefiti Emasensa Ekubvisa Laser
Kugadzirwa kwewafer kunosanganisira maitiro akasiyana-siyana akaomarara akadai se photolithography, etching, thin-film deposition, uye bonding—imwe neimwe inoda kunyatsorongeka pa micrometer kana nanometer level. Semuenzaniso:
-
Mu photolithography, kurongeka kwakanyatsojeka pakati pe photomask ne wafer kwakakosha kuti patani iendeswe pamusoro pe wafer nemazvo.
-
Panguva yekuiswa kwefirimu rakatetepa, kudzora kwakaringana ukobvu hwefirimu kwakakosha kuti uve nechokwadi chekuti michina inoshanda zvakanaka.
Kunyangwe kutsauka kudiki kunogona kukonzera zvikanganiso zvechigadzirwa kana kutoita kuti bhechi rese remawafer risashande.
Nzira dzechinyakare dzekuyera nadzo dzinowanzotadza kuzadzisa zvinodiwa nemazvo. Uyezve, dzine njodzi yekukuvadza kana kusvibisa pamusoro pewafer isina kusimba, nepo kumhanya kwadzo kunononoka kuchiita kuti dzisakwane zvinodiwa zvemetrology yemazuva ano.
LanbaosensorMasensa Ekudzingira Laser ePDE SeriesMhinduro Yakanakisisa yeMashandisirwo eWafer
◆Kuyerwa kweLaser Kusingabatanidzi
Inoshandisa laser beam projection panzvimbo dzakatarwa, ichiongorora zviratidzo zvakaratidzwa/zvakapararira kuti iwane data rekutama - ichibvisa kusangana kwemuviri nemawafer kudzivirira kukuvara kwemuchina uye njodzi dzekusvibiswa.
◆Kunyatsojeka kweMicron-level
Tekinoroji yepamusoro yelaser uye maalgorithms ekugadzirisa masaini anopa kurongeka uye kugadziriswa kwekuyera kwe micrometer, zvichizadzisa zvinodiwa nemazvo zvemaitiro ekugadzira wafer.
◆Mhinduro Inokurumidza Zvikuru (<10ms)
Inogonesa kutarisa panguva chaiyo kwekuchinja kwekugadzirwa kwezvinhu, zvichibvumira kuonekwa nekugadziriswa kwekutsauka nekukurumidza kuti kuwedzere kushanda zvakanaka kwekugadzira.
◆Kuenderana Kwakanaka Kwezvinhu
Inokwanisa kuyera zvinhu zvakasiyana-siyana uye mhando dzepamusoro uye inogona kugadziriswa zvakanyanya nezvakatipoteredza, yakakodzera matanho akawanda ekugadzirisa zvikamu zve semiconductor.
◆Dhizaini Yemaindasitiri Yakamanikana
Chinhu chakabatana chinoita kuti zvive nyore kubatanidza michina nehurongwa hwekudzora otomatiki, zvichigonesa kutarisa mashandiro nekuchenjera uye kugadzirisa closed-loop.
Maitiro ekushandisaMasensa Ekudzingira Laser ePDE SeriesmuKugadzira Wafer
Sensa yeLanbaoMasensa Ekudzingira Laser ePDE Series: Mashandisirwo Akakosha Mukugadzira Wafer
Nekushanda kwakanaka kwazvo, ma sensor eLansensor PDE laser displacement anoita basa rakakosha mumabasa akawanda ekugadzira wafer:
◆Kurongeka kweWafer & Positioning
Kuti zvive nyore kushandisa photolithography uye ma bonding process anoda kunyatsoenderana ne micron level, masensa edu anoyera nzvimbo ye wafer nema angles ekutsvedza kuti ave nechokwadi chekuti mask-to-wafer alignment yakakwana uye bonding arm positioning - zvichivandudza kurongeka kwe pattern transfer.
◆Metrology yeKukora kweWafer
Kugonesa kuyerwa kweukobvu husingasanganisike nekutarisa panguva chaiyo panguva yekuisa zvinhu, zvichiita kuti pave nekudzora kwakakodzera kunaka kwemhando yefirimu rakatetepa.
◆Kuongorora Kufara KweWafer
Kuona warpage yewafer uye kushanduka kwenzvimbo ne sub-micron resolution kudzivirira wafer dzisina kunaka kuti dzisafambe dzichidzika.
◆Kutarisa Ukobvu hweFirimu Rakatetepa
Kupa kutevedza ukobvu hwekuisa zvinhu panguva chaiyo panguva yeCVD/PVD kuitira kuchengetedza zvinodiwa zvemagetsi.
◆Kuonekwa Kwakakwana Kwezvikanganiso Pamusoro
Kuziva zvinhu zvisina kujairika paganda (micron-scale, particles) kuburikidza nekuongorora nzvimbo dzakasiyana-siyana, zvichivandudza zvakanyanya mwero wekuona zvikanganiso.
◆Kutarisa Mamiriro Emidziyo
Kutevera kufambiswa kwezvinhu zvakakosha (maoko erobhoti, mafambiro edanho) uye kudedera kwemuchina kuti zvifanogadziriswe uye kugadziriswa kwesimba.
PDE series yeLanbao sensor haingogumiri pakubatanidza misiyano yakakosha yetekinoroji mumusika wepamusoro wemasensa eindasitiri muChina asi inosimbisa zviyero zvitsva zvepasi rose nekushanda kwayo kwakanaka. Ingave kuwedzera mwero wegoho, kuderedza mari yekugadzira, kana kukurumidzisa kuvandudzwa kwemaitiro echizvarwa chinotevera, PDE series inomira sechombo chako chikuru chekukunda matambudziko ekugadzira semiconductor akakodzera!
Nguva yekutumira: Chivabvu-08-2025