Semiconductor kugadzira inomira seimwe yeakanyanya-inoda uye tekinoroji yakaoma minda mune yanhasi yepamusoro-tech indasitiri. Sezvo chip process ichifambira mberi yakananga ku3nm uye kunyange madiki node, iko kurongeka kwezviyero zvewafer ukobvu, kupfava kwepasi, uye microstructure dimensions inotarisisa chip goho uye kuita. Muchirevo chechinyorwa chino, laser displacement sensors, nekusabata-bata mashandiro, hunyanzvi hwepamusoro, nguva dzekupindura nekukurumidza, uye kugadzikana kwakawedzera, zvave zvakakosha "meso ekuyeresa" mukati mekuita semiconductor kugadzira.
Seyepakati substrate yekugadzira semiconductor mudziyo, wafers anoda yakanyanyisa kunyatsojeka uye kuvimbika panguva yekugadzira. Pakati pematanho mazhinji akaomesesa ekugadzira wafer, kuyerwa kwakaringana kwekutamisa kwakakosha - kunobata zvakananga kuita kwekupedzisira chip uye goho. Semutungamiri wekuvandudza muChina maindasitiri anonzwa chikamu, Lansensor's PDE yakatevedzana laser displacement sensors, ine micron-level resolution, hungwaru algorithms, uye maindasitiri-giredhi kuvimbika, yakabuda semhinduro inosarudzika yekugadzira wafer maitiro.
Precision Matambudziko muWafer Manufacturing uye Zvakanakira zveLaser Displacement Sensors.
Kugadzirwa kweWafer kunosanganisira akateedzana maitiro akaomarara akadai sephotolithography, etching, nhete-firimu deposition, uye bonding-imwe neimwe inoda kuomesesa kwakasimba pamicrometer kana kunyange nanometer level. Semuyenzaniso:
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Mu photolithography, kurongeka chaiko pakati pefotomask uye wafer kwakakosha kuti ive nechokwadi chekufambisa patani pawafer pamusoro.
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Munguva yakatetepa-firimu deposition, kunyatso kudzora kwehukobvu hwefirimu kwakakosha kuvimbisa kushanda kwemagetsi kwemidziyo.
Kunyangwe kutsauka kudiki kunogona kukonzera kukanganisa kwechigadzirwa kana kutopa batch rese rewafer kusashanda.
Nzira dzechinyakare dzekuyeresa dzemuchina dzinowanzotadza kuzadzisa zvinodiwa nepamusoro-soro. Uyezve, vanoisa panjodzi yekukuvadza kana kusvibisa iyo isina kusimba yewafer, nepo kumhanya kwavo kunononoka kuchiita kuti dzisakwane pakucheka-kumucheto metrology zvinodiwa.
LanbaosensorPDE Series Laser Displacement Sensors: The Optimal Solution yeWafer Applications
◆Kwete-kusangana Laser Kuyera
Inoshandisa laser beam fungidziro pane zvakanangwa nzvimbo, kuongorora inoratidzwa / yakapararira masaini kuti iwane kutamiswa dhata - kubvisa kubatwa kwemuviri nemawafer kudzivirira kukuvadzwa kwemakanika uye njodzi yekusvibiswa.
◆Micron-level Precision
Yepamberi laser tekinoroji uye siginecha yekugadzirisa algorithms inopa micrometer-chiyero kuyerwa kurongeka uye kugadzirisa, kusangana nekunyanyisa kudiwa kwemaitiro ekugadzira wafer.
◆Yakanyanya-kukurumidza Response (<10ms)
Inogonesa yechokwadi-nguva yekutarisa kweanochinja kugadzirwa kwakasiyana, ichibvumira kutsauka nekukasira kuona uye kugadzirisa kuti kuwedzere kushanda kwekugadzira.
◆Kunyatsoenderana Kwezvinhu
Inokwanisa kuyera zvinhu zvakasiyana-siyana uye mhando dzepamusoro dzine kusimba kwezvakatipoteredza, yakakodzera kune akawanda semiconductor maitiro matanho.
◆Compact Industrial Design
Iyo compact fomu chinhu inogonesa kusanganisa musanganiswa mune otomatiki michina uye yekudzora masisitimu, ichigonesa hungwaru maitiro ekutarisa uye yakavharwa-loop kugadzirisa.
Application Scenarios yePDE Series Laser Displacement SensorsmuWafer Processing
Lanbao sensorPDE Series Laser Displacement Sensors: Yakakosha Zvishandiso muWafer Manufacturing
Nekuita kwakasiyana-siyana, Lansensor PDE laser displacement sensors inotamba mabasa akakosha pane akawanda mawafer ekugadzira maitiro:
◆Wafer Alignment & Positioning
Kune photolithography uye ma bonding maitiro anoda micron-level kurongeka, masensa edu anoyera chaizvo chinzvimbo chewafer uye maangles ekurerekera kuti tive nechokwadi chekumisikidza kwemasiki-kune-wafer uye kusungirira ruoko rwekumisikidza - inonatsiridza maitiro ekufambisa nemazvo.
◆Wafer Ukobvu Metrology
Kugonesa kusingabatanidzwe ukobvu kuyerwa nechaiyo-nguva yekutarisa panguva yekuisa maitiro, kuve nechokwadi chakanyanya kutetepa-firimu remhando yekudzora.
◆Wafer Flatness Kuongorora
Kucherekedza wafer warpage uye deformation yepasi ine sub-micron resolution kudzivirira akaremara wafers kuti asaenderere pasi.
◆Mutete-Firimu Makobvu Monitoring
Kupa chaiyo-nguva yekuisa ukobvu hwekutevera panguva yeCVD/PVD maitiro ekuchengetedza akasimba emagetsi maitiro ekuita.
◆Surface Defect Detection
Kuziva micron-scale surface anomalies (scratches, particles) kuburikidza nepamusoro-resolution displacement mepu, zvakanyanya kunatsiridza hurema hwekuona mazinga.
◆Equipment Condition Monitoring
Kuteedzera zvakakosha chikamu chinotamiswa (marobhoti maoko, nhanho mafambiro) uye kudengenyeka kwemuchina kwekufungidzira kugadzirisa uye kugadzikana kwekugadzirisa.
Lanbao sensor's PDE yakatevedzana haingobhuri mabhenji akakosha tekinoroji mumusika weChina wepamusoro-soro weindasitiri sensor asi inomisikidza mitsva yepasirese mabhenji nekuita kwayo kwakasiyana. Kunyangwe kuwedzera mutero wegoho, kudzikisira mitengo yekugadzira, kana kusimudzira inotevera-gen process budiriro, iyo PDE nhevedzano inomira sechombo chako chekupedzisira kukunda matambudziko ekugadzira semiconductor chaiyo!
Nguva yekutumira: Chivabvu-08-2025