Muchikamu chekugadzira semiconductor, abnormal chip stacking inyaya yakaoma yekugadzira. Kusatarisirwa kurongedza machipisi panguva yekugadzira kunogona kukonzera kukuvadzwa kwemidziyo uye kutadza kushanda, uye zvinogona kukonzera kuwanda kwezvigadzirwa, zvichikonzera kurasikirwa kukuru kwehupfumi kumabhizinesi.
Nekuenderera mberi kwekunatsiridza kwemaitiro ekugadzira semiconductor, zvichemo zvepamusoro zvinoiswa pakutonga kwemhando panguva yekugadzira. Laser displacement sensors, senge isingabatanidzi, yakakwirira-chaiyo yekuyera tekinoroji, inopa mhinduro inoshanda yekuona chip stacking abnormalities nekukurumidza uye kwakaringana kugona kwavo kuona.
Detection Principle uye Anomaly Judgment Logic
Mune semiconductor yekugadzira maitiro, machipi anowanzo kuiswa pane anotakura kana matiraki ekutakura mune imwechete-layer, flat hurongwa. Panguva ino, kureba kweiyo chip pamusoro ndeye preset baseline kukosha, kazhinji huwandu hwehupamhi hwechip uye hurefu hwekutakura. Kana machipisi akaturikidzana netsaona, kureba kwawo kwepamusoro kuchawedzera zvakanyanya. Shanduko iyi inopa hwaro hwakakosha hwekuona stacking abnormalities.
Transport Track Stacking Detection
Nzira dzekufambisa inzira dzakakosha dzekufambisa chip panguva yekugadzira. Nekudaro, machipi anogona kuungana pamatinji nekuda kwe electrostatic adsorption kana kutadza kwemechani panguva yekufambisa, zvichitungamira pakuteedzera ma blockages. Mablockage akadaro haangogone kukanganisa kuyerera kwekugadzira asiwo kukuvadza machipisi.
Kuti utarise kuyerera kusingabviri kuyerera kwemateki ekufambisa, laser displacement sensors inogona kuiswa pamusoro pemateki kuti itarise kureba kweiyo track cross-section. Kana hurefu hwenzvimbo yakasarudzika husina kujairika (semuenzaniso, yakakwirira kana yakadzikira kupfuura ukobvu hwechikamu chimwe chete chemachipisi), masensa anozozviona senge stacking blockage uye inokonzeresa alarm yekuzivisa vashandisi kubata nenguva, kuve nechokwadi chekuyerera kwekugadzirwa kwakanaka.
Detection Process
Lanbao laser displacement sensors inoyera kureba kwenzvimbo yakanangwa nekuburitsa danda relaser, kugamuchira chiratidzo chinoratidzwa, uye kushandisa nzira ye triangulation.
Iyo sensor inofananidzwa yakatarisana nenzvimbo yekuona chip, ichiramba ichiburitsa laser uye kugamuchira chiratidzo chinoratidzwa. Munguva yekufambisa chip, iyo sensor inogona kuwana chaiyo-nguva yehurefu hwepamusoro ruzivo.
Iyo sensor inoshandisa iyo yemukati algorithm kuverengera iyo chip pamusoro kureba kukosha kubva kune yakawanikwa inoratidzwa chiratidzo. Kuti isangane nekumhanya-mhanya kwekufambisa zvinodiwa zvemitsetse yekugadzira semiconductor, izvi zvinoda kuti sensor ive neyakanyanya kurongeka uye yakakwira sampling frequency.
Urefu hunotenderwa mutsauko wakasetwa, kazhinji ±30 µm kubva paurefu hwekutanga. Kana kukosha kwakayerwa kwakadarika danho iri, zvinotariswa kuva stacking abnormality. Iyi yekumisikidza yekumisikidza pfungwa inogona kunyatso siyanisa pakati peyakajairwa single-layer machipisi uye akaturikidzana machipisi.
Pakuonekwa kwekusagadzikana, iyo sensor inokonzeresa inonzwika uye yekuona alarm, uye panguva imwe chete inomisikidza ruoko rwerobhoti kuti ibvise nzvimbo isina kujairika, kana kumbomira mutsara wekugadzira kudzivirira kuwedzera kuipa kwemamiriro ezvinhu. Iyi yekukurumidza mhinduro nzira inoderedza kurasikirwa kunokonzerwa nekurongedza kusaenzana kusvika pamwero mukuru.
Chaiyo-nguva, yakakwirira-chaiyo yekuona chip stacking abnormalities uchishandisa laser displacement sensors inogona kuvandudza zvakanyanya kuvimbika uye goho remitsetse yekugadzira semiconductor. Nekuenderera mberi kwetekinoroji, laser displacement sensors ichaita basa rakakura mukugadzira semiconductor, ichipa rutsigiro rwakasimba rwekusimudzira indasitiri.
Nguva yekutumira: Mar-25-2025