Masensa eCCD Wire Diameter Anopa Simba reKuvandudza Maitiro eSemiconductor Wafer

Sezvo kugadzirwa kwema semiconductor kuchipinda munguva ye nanometer, ma wafer, senzira huru yekutakura machipisi, anoona zvakananga goho nemutengo kuburikidza nekurongeka kwawo uye kugadzikana kwekona panguva yekugadzirisa nekutakura.

 

Munguva yese yekucheka, kukwenya, kupeta, kuchekerera, kurongedza, kurongedza zvisati zvaitwa uye mamwe maitiro, mawafers anowanzo kuve nezvikanganiso zvidiki, kutsvedza kwemakona uye kutsauka kwenzira nekuda kwekuzunguzika kwemuchina, zvikanganiso zvekutumira uye kutsauka kwezvishandiso. Kunyangwe kutsauka kwemazinga e micron kunogona kutungamira kumatambudziko ehukuru senge kucheka chipping, overlay offset uye bonding failure, zvichideredza zvakanyanya kugona kwekugadzira uye kuvandudzwa kwegoho. Nzira dzechinyakare dzekugadzirisa michina uye nzira dzekugadzirisa nemaoko dzine kururama kwakaderera uye kunonoka kupindura, kutadza kugadzirisa kugadzirwa kwehukuru nekukurumidza uye kusangana nezvinodiwa nemaitiro epamusoro.

 

Zvichienderana neizvi, sensor yekugadzirisa waya yeLanbao CCD yave chishandiso chinotsigira kurongeka kwakarurama uye kutsauka mumabasa ekugadzira mawafer e semiconductor, ine kugona kwayo kwekusabata, kunyatsojeka uye kugadzirisa panguva chaiyo. Inopa vimbiso yakavimbika yekugadzira otomatiki kunyatsojeka.

 

Panguva yekushanda, transmitter inogadzira keteni remwenje rakafanana rinofukidza mupendero wewafer. Matrix yeCCD inogamuchira inotora muganhu wechiedza-rima wakavharika, inoburitsa wafer offset values ​​munguva chaiyo, inovadzosera kuhurongwa hwekudzora mutsetse wekugadzira, uye inotyaira UVW platform kuti ipedze millisecond-level dynamic correction, ichigadzira closed-loop control yekuyera - kuverenga - kugadzirisa. Maitiro ese anoita chete data-based position sensing, pasina kutora mifananidzo, kufungidzira kana kuona defect. Inopa mhinduro nekukurumidza, kugadzikana kwakasimba uye mutengo wakaderera, ichinyatsoenderana nemamiriro ekugadzirwa kwe semiconductor mass.

 

Sensor yekugadzirisa waya yeLanbao CCD yakagadzirisa zvinhu zvakanyanya, ikawana kunyatsorongeka kwekuunganidza kwe ±1 μm, iyo inogona kubata zvakananga ma displacements madiki uye angular deviations edges e 8/12-inch wafer. Yakashongedzerwa ne dynamic temperature drift compensation algorithm, ine temperature coefficient yakaderera se ±8 μm/℃, ichidzivirira zvinobudirira kuchinja-chinja kwetembiricha yeworkshop, kudedera kudiki uye kukanganiswa kweguruva. ​​Inochengetedza data rakagadzikana pasina zvikanganiso zvekudonha kana calibration panguva yekushanda kwenguva refu. Inotsigira 24/7 isina kukanganiswa high-speed dynamic correction, inoita kuti nanometer-level alignment ive yakarongeka uku ichivandudza zvakanyanya kushanda kweproduction line flow, ichienzanisa kunyatsorongeka uye kushanda zvakanaka.

 

Nemakore akawanda ekushandisa tekinoroji yekuona maindasitiri, Lanbao CCD wire diameter correction sensor inopa mabhenefiti matatu makuru mukugadzirisa wafer, ichinyatso zadzisa zvinodiwa zve semiconductor mass production:

• Kugadzirisa kwakasimba kwakanyatsojeka:Inounganidza dhayamita yewaya yemucheto uye data renzvimbo munguva chaiyo, nemhinduro ye millisecond yekugadzirisa kutsauka. Inobvisa kunonoka kwekuenderana kwe static uye inochinjika kumitsara yekugadzira otomatiki inokurumidza.

• Kugadzikana kwakanyanya uye kushanda kwekudzivirira kukanganiswa:Yakashongedzerwa nemodule yekusefa inodzivirira glare, inoshanda zvakadzikama pasi pe3000 lux illumination, ichienderana nekuchena kwakanyanya uye mamiriro ekushanda anopindira zvakanyanya mumaworkshop e semiconductor.

• Kusabata kana kukuvara:Inotora chiyero chisingabatanidzi keteni rechiedza che optical, ichidzivirira kusangana nepamusoro pewafer nemupendero. Inodzivirira zvachose kukwenya nekukuvadzwa kwewafer dzakatetepa zvakanyanya (≤200 μm), ichivimbisa kuti wafer yakanyatsogadzirwa.

 

Parizvino, sensor yekugadzirisa waya yeLanbao CCD inoshandiswa zvakanyanya mumabasa makuru akadai sewafer pre-alignment, assembly line transmission correction, pre-dicing alignment uye pre-packaging positioning. Inogona kuita real-time position deviation monitoring, data feedback uye dynamic correction closed loop control, ichiita kuti wafers dzirambe dzakajairwa processing positions uye transmission trajectories mukati memaitiro ese. Inogadzirisa zvakanyanya matambudziko ekugadzirwa kwezvinhu zvakaita sezvigadzirwa zvisina kunaka, kurasikirwa kwezvinhu uye process rework inokonzerwa ne alignment offsets. Data rakayerwa rinoratidza kuti neLanbao CCD correction solution, mari ye calibration yemaoko inoderedzwa ne80%, uye nguva yekushanda kwemidziyo inoderedzwa zvakanyanya, zvichibatsira mabhizinesi kuzadzisa zvinangwa zviviri zvekuderedza mari, kuvandudza mashandiro uye kusimudzira mhando.

 

 

 

Sekambani ine tekinoroji yepamusoro-soro inoshanda zvakanyanya mukugadzira zvinhu zvemaindasitiri, Lanbao Sensing inotarisa pakugadzirisa matambudziko mukugadzira zvinhu zve semiconductor intelligent uye kugadzira michina yekugadzirisa uye kusiyanisa sensor yakagadzirirwa kugadzirwa kwepamusoro-soro. CCD wire diameter correction sensor yayo yakagadzirirwa chete mamiriro ekugadzirisa wafer nekuchenjera, ichinyatsoenderana nemazinga ekugadzirwa kwezvinhu zve semiconductor. Ichitsigira EtherCAT industrial bus, inogona kubatana zvakanaka kune akasiyana-siyana automated wafer production lines. Mune ramangwana, Lanbao Sensing icharamba ichisimbisa kuvapo kwayo mu semiconductor sector, ichivandudza tekinoroji yekugadzirisa kunzwa nekushanda kwechigadzirwa, uye ichipa simba kukusimudzira indasitiri ye semiconductor yeChina nehunyanzvi hwakasimba hwekuona zvinhu zvemaindasitiri.